Measurement method of film parameters of metal based on imaging ellipsometry and surface-plasmon resonance

被引：0
|
作者：
Hu, Shiyu [1 ,2 ]
Zeng, Aijun [1 ,2 ]
Gu, Liyuan [1 ,2 ]
Huang, Huijie [1 ,2 ]
Hu, Guohang [1 ,2 ]
He, Hongbo [1 ,2 ]
机构：
[1] Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai,201800, China
[2] University of Chinese Academy of Sciences, Beijing,100049, China
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2015年 / 42卷 / 11期
关键词：
Film parameters - Imaging ellipsometry - Measurement methods - Normalized reflectances - Numerical fitting - S-polarized light - Surface plasmon resonance effects - Transcendental equations;
D O I：
10.3788/CJL201542.1108001
中图分类号：
学科分类号：
摘要：
15
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