A novel non-driven structural MEMS-based gyroscope

被引:0
|
作者
Lifeng W. [1 ]
Fuxue Z. [2 ]
机构
[1] Information Engineering College, Capital Normal University
[2] Research Centre of Sensor Technology, Beijing Information Science and Technology University
关键词
Acceleration; Mems-based gyroscope; Yaw angular rate;
D O I
10.4156/jdcta.vol4.issue6.9
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
This paper describes a unique capacitively-sensed MEMS-based gyroscope, which utilizes rotating carrier rotate as driven force and responds to an external angular rate of yaw due to the Coriolis Effect. The basic construction and operating principles of the gyroscope are described and illustrated. MEMS-based gyroscope output is presented at different yaw angular acceleration. The raw results obtained from these tests performed to validate the effectiveness of the gyroscope.
引用
收藏
页码:85 / 88
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