Mold deformation in roller-type nanoimprint lithography

被引：0
|
作者：
Lan, Hongbo [1 ,2 ]
Xu, Fangchao [1 ]
Li, Zenghui [1 ]
Liang, Sen [1 ]
Ding, Yucheng [2 ]
机构：
[1] Nanomanufacturing and Nano-Optoelectronics Lab, Qingdao Technological University, Qingdao,266033, China
[2] State Key Laboratory for Manufacturing System Engineering, Xi'an Jiao Tong University, Xi'an,710049, China
来源：
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2015年 / 51卷 / 07期
关键词：
All Open Access; Bronze;
D O I：
10.3901/JME.2015.07.155
中图分类号：
学科分类号：
摘要：
23
引用
收藏
页码：155 / 161
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