Feasibility of laser induced plasma micro-machining (LIP-MM)

The paper offers evidence on the feasibility of a newly proposed micro-machining process, which is motivated by the need to overcome the various limitations associated with μ-EDM and conventional ultra-short laser micro-machining processes. The limitations in μ-EDM and laser micro-machining processes are mainly due to the requirement of a conductive electrode and workpiece, electrode wear and compensation strategies, and complex process control mechanisms respectively. The new process uses a laser beam to generate plasma in a dielectric near the workpiece surface whose explosive expansion results in material removal by mechanisms similar to those that occur in μ-EDM. © 2010 Springer Berlin Heidelberg.