Microsensor for simultaneous measurement of humidity and temperature with three-dimensionally structured interdigital electrodes

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作者：
Mikrosensor für gleichzeitige Feuchte- und Temperaturmessung mit dreidimensional strukturierten Interdigitalelektroden
机构：
[1] Fischerauer, Alice
[2] Kotschate, Alexander
[3] Fischerauer, Gerhard
来源：
| 2013年 / VDE Verlag GmbH卷
关键词：
443.1 Atmospheric Properties - 761 Nanotechnology - 933 Solid State Physics;
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摘要：
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