Correction algorithm of random phase shifting errors in phase measuring profilometry based on simulated annealing

被引：0
|
作者：
Ren X.-H. [1 ]
Yang L. [1 ]
Qu B. [2 ]
机构：
[1] College of Information and Control Engineering in China University of Petroleum
[2] Dongying Vocational College
来源：
Zhongguo Shiyou Daxue Xuebao (Ziran Kexue Ban)/Journal of China University of Petroleum (Edition of Natural Science) | 2010年 / 34卷 / 03期
关键词：
Phase error; Phase shifting algorithm; Phase-measuring profilometry; Simulated annealing algorithm;
D O I：
10.3969/j.issn.1673-5005.2010.03.033
中图分类号：
学科分类号：
摘要：
A correction model of the random phase shifting error on the basis of random step length was established. The simulated annealing algorithm was adopted in the optimization estimation of random phase shifting error. A new algorithm of truncation phase calculation was derived by least square method. The computer simulated results and the experimental results were presented. The simulation results show that this algorithm can optimize the random phase shifting error accurately and improve the measurement accuracy.
引用
收藏
页码：162 / 164+169
相关论文
共 8 条
  • [1] Hao Y.-D., Zhao Y., Li D.-C., Nonlinear excess fraction method and its applications to profilometry, Acta Optica Sinica, 19, 11, pp. 1518-1522, (1999)
  • [2] Kong I.-B., Kim S.-W., General algorithm of phase shifting interferometry by iterative least-squares fitting, Opt Engng, 34, 1, pp. 183-187, (1995)
  • [3] Kong I.-B., Kim S.-W., Portable inspection of precision surfaces by phase shifting interferometry withautomatic suppression of phase shift errors, Opt Engng, 34, 5, pp. 1400-1404, (1995)
  • [4] Wang L.-W., Su X.-Y., Zhou L.-B., Correct on algorithm of random phase shifting errors in phase measuring profilometry, Acta Optica, 24, 5, pp. 614-618, (2004)
  • [5] Liu H.-L., Liu M., A mixed genetic simulated annealing algorithm and its improvement, Journal of Guangzhou University(Natural Science Edition), 14, 2, pp. 503-506, (2005)
  • [6] Yang F.-T., Lu X.-X., Zhong L.-Y., Et al., Global phase unwrapping algorithm based on simulated annealing, Laser Journal, 27, 3, pp. 25-30, (2006)
  • [7] Peng Z.-J., Qian F., Wang X.-F., Et al., Phase unwrapping algorithm based on simulated annealing, Acta Optica Sinica, 23, 7, pp. 845-849, (2003)
  • [8] Stoilov G., Dragostinov T., Phase-stepping interferometry: Five frame algorithm with an arbitrary step, Optics and Lasers in Engineering, 28, 4, pp. 61-69, (1997)
1