Silicon conveyor based planar electromagnetic device for linear displacement

被引：0
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作者：
Roberval Laboratory, UMR UTC-CNRS 6253, Université de Technologie de Compiègne, France [1 ]
不详 [2 ]
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来源：
IEEE ASME Int Conf Adv Intellig Mechatron AIM | 2010年 / 231-236期
关键词：
Compendex;
D O I：
5695869
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摘要：
Silicon
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