Measurement of Au deposition rates with low-energy mass separated ion beam deposition apparatus

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Center for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, 565-0871 Osaka [1 ]
不详 [2 ]
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来源：
Shinku | 2006年 / 3卷 / 177-179期
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Deposition;
D O I：
10.3131/jvsj.49.177
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