Simulation and optimization of temperature field for large-scale nitride MOCVD reactor with electromagnetic heating

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[1] Li, Zhi-Ming
[2] Jiang, Hai-Ying
[3] Li, Jin-Ping
[4] Gan, Xiao-Bing
[5] Hu, Shi-Gang
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Li, Z.-M. (zmli686@163.com) | 1600年 / Chinese Ceramic Society, Baiwanzhuang, Beijing, 100831, China卷 / 42期
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