Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events

被引：0

作者：

Chung, Vincent P. J. ^{[1
]}

Li, Xiaoliang ^{[1
]}

Guney, Metin G. ^{[1
]}

Paramesh, Jeyanandh ^{[1
]}

Mukherjee, Tamal ^{[1
]}

Fedder, Gary K. ^{[2
,3
]}

机构：

[1] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA

[2] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA

[3] Carnegie Mellon Univ, Mfg Futures Inst, Pittsburgh, PA USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2024年 / 33卷 / 06期

关键词：

Hourglass-beam; nanogram-proof-mass; tapered comb-finger electrodes; accelerometer; high-g; high dynamic range; navigation through high shock; CMOS MEMS;

D O I：

10.1109/JMEMS.2024.3463406

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the development of a monolithic capacitive accelerometer array system that has a designed full-scale range of +/- 5 , a bandwidth larger than 10, with a minimum resolution of 5and a minimum bias instability of 700. The resolution and full-scale range of the accelerometers correspond to a dynamic range of 120that is on par with state-of-the-art low-accelerometers. High bandwidth and detectability are achieved by the nano-gram proof mass and relatively stiff folded-flexure transducer design. High dynamic range with input range is enabled by the hourglass-beam, interdigitated tapered comb-finger electrodes, and arrayed accelerometers. The accelerometer array design provides a potential path towards an emerging navigation through high-shock application. [2024-0091]

引用

页码：685 / 696

页数：12