Simulation and optimization of plasma immersion ion implantation reactor

被引：0
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作者：
机构：
[1] Dou, Wei
[2] Zhang, Yang
[3] Li, Chaobo
[4] Xia, Yang
来源：
Li, C. (lichaobo@ime.ac.cn) | 1600年 / Science Press卷 / 34期
关键词：
Computational fluid dynamics - Flow of gases - Plasma applications - Plasma density - Ion implantation;
D O I：
10.3969/j.issn.1672-7126.2014.03.17
中图分类号：
学科分类号：
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