A method for evaluations on the radiation trapping in an inductively coupled plasma in argon

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作者：
Scharwitz, Christian [1 ]
Makabe, Toshiaki [1 ]
机构：
[1] Department of Electronics and Electrical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Yokohama, 223-8522, Japan
来源：
Journal of Applied Physics | 2009年 / 106卷 / 11期
关键词：
One of the general challenges for the evaluation and interpretation of optical emission spectroscopy measurements is the occurrence of radiation trapping; which is also named self-absorption or opacity. A convenient technique to treat radiation trapping is the introduction of a parameter; which is called escape factor and gives a measure for the amount of radiation trapping. In this paper evaluations on the concept of escape factors are presented for an inductively coupled plasma in argon. Especially; the strong argon line at 811.53 nm; which arises from the transition of 2p9-1s5; is under consideration. To estimate escape factors for this line; a particular method is proposed and presented here. First experimental results are obtained under the restrictive assumptions that transitions into the resonant levels 1s2 and 1s4 are sufficiently optically thin and ratios of population densities are constant. © 2009 American Institute of Physics;
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