Vacuum technologies in fabricating micro heat pipe with sintered wick

被引：0

作者：

Li X. ^{[1
,2
,3
]}

Guo J. ^{[2
]}

Wang S. ^{[2
]}

Shi Z. ^{[1
]}

Jiang H. ^{[1
]}

Lou X. ^{[1
]}

Zhang H. ^{[2
]}

机构：

[1] Qiqihar CNC Equipment Corp. Ltd.

[2] School of Mechatronics Engineering, Qiqihar University

[3] Department of Mechanical and Power Engineering, Harbin University of Science and Technology

来源：

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2011年 / 31卷 / 02期

关键词：

Crimping seal; Micro heat pipe with sintered wick; Secondary deaeration; Vacuum-pumping; Working fluid freezing; Working fluid perfusing;

D O I：

10.3969/j.issn.1672-7126.2011.02.13

中图分类号：

学科分类号：

摘要：

A novel technique has been successfully developed to fabricate the micro heat pipe with sintered wick, recently widely used as highly efficient heat-sink in manufacturing microelectronic and optoelectronic chips. In the technique, the injected working fluid was first frozen; next, degassing was done by rapidly pumping the pressure down to below 110 Pa; and finally, the micro heat pipe was crimping sealed, followed by secondary degassing and crimping sealing. The field tests on industrial scale show that the micro heat pipe with sintered wick fabricated with the newly-developed technique outperforms that produced in the conventional method. For example, the pumping time is reduced by 2/3, and its thermal conductivity and quantity of the working fluid better satisfy the stringent requirements.

引用

页码：187 / 193

页数：6

共 20 条

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