Chemical mechanical polishing of thin film diamond

被引：0
|
作者：
Thomas, Evan L.H. [1 ]
Nelson, Geoffrey W. [2 ]
Mandal, Soumen [1 ]
Foord, John S. [3 ]
Williams, Oliver A. [1 ]
机构：
[1] School of Physics and Astronomy, Cardiff University, Cardiff CF24 3AA, United Kingdom
[2] Department of Materials, Imperial College, London SW2 2BP, United Kingdom
[3] Department of Chemistry, University of Oxford, Oxford OX1 3TA, United Kingdom
来源：
Carbon | 2014年 / 68卷
关键词：
Chemical mechanical polishing;
D O I：
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学科分类号：
摘要：
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页码：473 / 479
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