Nano-positioning using interferometric methods into a miniaturised device

The positioning into micro fabrication systems is an important part for general operational success. The robustness of the positioning subsystem generates the accuracy of displacements specific to this kind of technical applications. The authors focused on the obtaining for an experimental device that has permitted to develop an interferometric measure method for sub micrometric displacements using optical devices. The high accuracy requested by micro applications involves Nano measure level and the capacity to develop data flow for movement control at this scale in real time. The wavelength of utilised laser beam is 633 nm and became the measure unit for positioning system. Also the measuring part is completed by another part referred to actuation, more precisely to piezoelectric actuation. A dynamic measure method was developed in this paper, utilising piezoelectric actuators designed for oscillating working actions. Finally we present here the performance of interferometric device that is conceived for feedback positional control, following construction of Nano-positioning closed loop command into the next paper. © 2015, Editura Cefin. All rights reserved.