Design and mechanical character analysis of a novel type of micro electrostatic actuator with multi-folded suspensions

被引：0
|
作者：
Zhao, Jiangming
Chen, Xiaoyang
Wang, Xiaojing
机构：
[1] School of Electromechanical Engineering and Automation, Shanghai University, Shanghai 200072, China
[2] School of Mechanical Engineering, Zhengzhou University, Zhengzhou 450001, China
来源：
Jixie Qiandu/Journal of Mechanical Strength | 2007年 / 29卷 / 01期
关键词：
14;
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页码：5 / 11
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