MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

被引：0

作者：

Lin Y.-Y. ^{[1
]}

Zheng X.-D. ^{[1
]}

Wu H.-B. ^{[1
]}

Ma Z.-P. ^{[1
]}

Jin Z.-H. ^{[1
]}

机构：

[1] Micro-satellite Research Center, Zhejiang University, Hangzhou

来源：

Zhejiang Daxue Xuebao (Gongxue Ban)/Journal of Zhejiang University (Engineering Science) | 2019年 / 53卷 / 09期

关键词：

Constant resonance frequency drive; Drive-mode control; MEMS gyroscope; Parametric excitation; Triangular parallel capacitors;

D O I：

10.3785/j.issn.1008-973X.2019.09.019

中图分类号：

学科分类号：

摘要：

A novel drive-mode control scheme for MEMS gyroscopes was presented, where the gyroscopes were parametrically excited with constant resonant frequency. The proposed control scheme enabled a constant resonant frequency excitation with parametric amplification in the drive mode via triangular parallel capacitors, to keep the resonant frequency and quality factor constant against environmental fluctuations, and to improve the gyroscope temperature performance. First, frequency tuning and parametric excitation by means of triangular capacitors were introduced. Then, a new control scheme based on parametric excitation at constant frequency was proposed and implemented. The simulation results indicate that the resonant frequency is tuned to be constant and the dive-mode vibration amplitude is controlled to be stable. Finally, the experimental results indicate that the bias instability of gyroscope was 1.69°/h, which was better than that of the traditional scheme, and the temperature drift of zero-rate output during temperature cooling down was reduced to half compared to the traditional control scheme. © 2019, Zhejiang University Press. All right reserved.

引用

页码：1795 / 1804

页数：9

共 19 条

[1] Northemann T., Maurer M., Rombach S., Et al., Phase-locked drive loop with amplitude regulation based on phase-shifting for gyroscope, IEEE International Conference Solid-State Sensors, Actuatrors, and Microsystems (Transducers), pp. 16-19, (2011)
[2] Oboe R., Antonello R., Lasalandra E., Et al., Control of a Z-axis MEMS vibrational gyroscope, IEEE/ASME Transactions on Mechatronics, 10, 4, pp. 364-370, (2005)
[3] Cui J., Chi X.Z., Ding H.T., Et al., Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes, Journal of Micromechanics and Microengineering, 19, 12, (2009)
[4] Zhu H.J., Jin Z.H., Hu S.C., Et al., Drive mode control for MEMS gyroscopes with electrostatically tunable structure, IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-Nano), pp. 273-276, (2014)
[5] Oropeza-Ramos L.A., Turner K.L., Parametric resonance amplification in a MEMGyroscope, IEEE Sensors, pp. 660-663, (2005)
[6] Harish K.M., Gallacher B.J., Burdess J.S., Et al., Experimental investigation of parametric and externally forced motion in resonant MEMS sensors, Journal of Micromechanics and Microengineering, 19, 1, (2008)
[7] Khirallah K., Parametric excitation, amplification, and tuning of MEMS folded-beam comb drive oscillator, Journal of Microelectromechanical Systems, 22, 2, pp. 318-330, (2013)
[8] Nitzan S.H., Zega V., Li M., Et al., Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope, Scientific Reports, 5, (2015)
[9] Gallacher B.J., Burdess J.S., Harish K.M., A control scheme for a MEMS electrostatic resonant gyroscope excited using combined parametric excitation and harmonic forcing, Journal of Micromechanics and Microengineering, 16, 2, pp. 320-331, (2006)
[10] Senkal D., Ng E.J., Hong V., Et al., Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating < 20 PPM scale factor stability, 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 29-32, (2015)

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