3-DOF Compliant Precision Positioning Stage Based on Piezoelectric Actuators

被引：0
|
作者：
Zhang Q. [1 ]
Dong Y. [1 ]
Ren G. [1 ,2 ]
Sun Y. [1 ]
Peng Y. [1 ]
Pu H. [1 ]
Li X. [1 ]
机构：
[1] School of Mechatronic Engineering and Automation, Shanghai University, Shanghai
[2] School of Mechanical and Electric Engineering, Guangzhou University, Guangzhou
来源：
Zhendong Ceshi Yu Zhenduan/Journal of Vibration, Measurement and Diagnosis | 2019年 / 39卷 / 01期
关键词：
Flexure hinge; Piezoelectric actuator; Precision positioning stage; The pseudo-rigid-body model;
D O I：
10.16450/j.cnki.issn.1004-6801.2019.01.026
中图分类号：
学科分类号：
摘要：
In this paper, a novel 3-PRR planar parallel compliant stage driven by piezoelectric actuators is proposed. In order to eliminate the assembly clearance and friction of the traditional joints, the semi-circular flexure hinge and the right-angle flexure hinge are chosen as the flexible rotation joint and flexible prismatic joint in each chain of the stage, respectively, and then the finite element analysis is used to analyze the stiffness of the two types of hinges. In order to achieve larger workspace in a given size, a lever displacement amplification mechanism is planned in each branch. Based on the "Pseudo-rigid Body Model Method", the kinematic model of the compliant positioning stage is established. Then the finite element analysis of the compliant parallel stage is performed using ANSYS software, and its static characteristics are obtained. Finally, the 3-PRR planar parallel compliant stage experimental test system is set to verify the kinematic model. The maximum error results between the theoretical kinematic analysis, the finite element analysis and the experimental tests in x, y, and φp directions are 10.81%, 9.66% and 9.79%, respectively, which validate the correctness of the kinematic model. © 2019, Editorial Department of JVMD. All right reserved.
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页码：176 / 183and229
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