共 50 条
- [7] The use of magnetorheological finishing (MRF) to relieve residual stress and subsurface damage on lapped semiconductor silicon wafers OPTICAL MANUFACTURING AND TESTING IV, 2001, 4451 : 286 - 294
- [8] Research on material removal mechanism of magnetorheological finishing ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY II, 2006, 532-533 : 133 - +