Accuracy calibration of alignment system of chip mounter based on grating

被引:0
|
作者
School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China [1 ]
不详 [2 ]
机构
来源
Guangxue Jingmi Gongcheng | 2009年 / 10卷 / 2425-2430期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] Vision system chip mounter
    Ito, Hiroshi
    Robot Tokyo, 1994, (97): : 72 - 77
  • [2] Chip component mounter with vision system
    Sasaki, Norio
    Robot Tokyo, 1994, (97): : 60 - 66
  • [3] Development of a novel optical alignment system for accurate leveling adjustment of a high-precision chip mounter
    Liu Wenchao
    Zhong Yuning
    Yang Liangen
    Wang Xuanze
    Xie Tiebang
    THIRD INTERNATIONAL SYMPOSIUM ON PRECISION MECHANICAL MEASUREMENTS, PTS 1 AND 2, 2006, 6280
  • [4] Analysis of factors influencing alignment accuracy in coaxial alignment system of grating diffraction
    Chen, Weiming
    Hu, Song
    Liu, Yeyi
    Guo, Li
    Guo, Jingping
    Weixi Jiagong Jishu/Microfabrication Technology, 2000, (01): : 45 - 50
  • [5] Focus calibration method based on the illumination beam scanning angle modulation in a grating alignment system
    Zhang, Tao
    Ma, Yarui
    Li, Jiean
    Sun, Tao
    Zhao, Xingyu
    Cui, Jiwen
    OPTICS EXPRESS, 2021, 29 (06) : 9429 - 9445
  • [6] Improvement of the alignment accuracy of differential grating
    Department of Automatic Control, Southeast University, Nanjing 210096, China
    不详
    Jiliang Xuebao, 2006, 1 (7-11):
  • [7] Calibration Method for a Laser-based Alignment System
    Xu, Xiaoxuan
    Kang, Yanhui
    Qiu, Zurong
    Wang, Binghe
    ELEVENTH INTERNATIONAL CONFERENCE ON INFORMATION OPTICS AND PHOTONICS (CIOP 2019), 2019, 11209
  • [8] Load Optimization Scheduling of Chip Mounter Based on Hybrid Adaptive Optimization Algorithm
    Yan X.
    Zuo H.
    Hu C.
    Gong W.
    Sheng V.S.
    Complex System Modeling and Simulation, 2023, 3 (01): : 1 - 11
  • [9] Calibration method for mask grating mark imaging in lithography alignment
    Zhu, J. (zsyioe@163.com), 1600, Science Press (40):
  • [10] Photonic chip sensing test system based on grating coupling techniques
    Liu, Xingyu
    Guo, Rongxiang
    Lang, Qiyue
    Liu, Tiegen
    Cheng, Zhenzhou
    Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2024, 45 (07): : 156 - 164