Characterisation of size distribution and positional misalignment of nanoscale islands by small-angle X-ray scattering

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作者
Heldt, Georg [1 ,2 ]
Thompson, Philip [1 ]
Chopdekar, Rajesh V. [2 ]
Kohlbrecher, Joachim [2 ]
Lee, Stephen [3 ]
Heyderman, Laura J. [2 ,4 ]
Thomson, Thomas [1 ]
机构
[1] School of Computer Science, University of Manchester, Manchester,M139PL, United Kingdom
[2] Paul Scherrer Institut (PSI), Villigen,5232, Switzerland
[3] School of Physics and Astronomy, University of St Andrews, North Haugh, St Andrews,KY169SS, United Kingdom
[4] Laboratory for Mesoscopic Systems, Department of Materials, ETH Zurich, Zurich,8093, Switzerland
来源
Journal of Applied Physics | 2019年 / 125卷 / 01期
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X ray scattering;
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