Development of a polishing pad for achieving flat workpiece edge shape based on the finite element method analysis

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Graduate Shcool of Engineering, Osaka University, 2-1 Yamada-oka, Suitashi, Osaka, 5650871, Japan [1 ]
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Nihon Kikai Gakkai Ronbunshu C | 2009年 / 752卷 / 1108-1113期
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10.1299/kikaic.75.1108
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