Erratum: Effects of the erosion zone of magnetron sputtering targets on the spatial distribution of structural and electrical properties of transparent conductive Al-doped ZnO polycrystalline films (J. Appl. Phys. (2018) 124, (065304) 10.1063/1.5086316)

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作者
Nomoto, Junichi [1 ,3 ]
Makino, Hisao [1 ]
Inaba, Katsuhiko [2 ]
Kobayashi, Shintaro [2 ]
Yamamoto, Tetsuya [1 ]
机构
[1] Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada, Kami, Kochi,782-8502, Japan
[2] X-Ray Research Laboratory, Rigaku Corporation, 3-9-12 Matsubara, Akishima, Tokyo,196-8666, Japan
[3] Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki,305-8565, Japan
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Journal of Applied Physics | 2019年 / 125卷 / 02期
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