Effect of azimuthally asymmetric reactor components on a parallel plate capacitively coupled plasma

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作者：
Kenney, Jason A. [1 ]
Rauf, Shahid [1 ]
Collins, Ken [1 ]
机构：
[1] Applied Materials Inc., M/S 81517, 974 E. Arques Ave., Sunnyvale, CA 94085, United States
来源：
Journal of Applied Physics | 2009年 / 106卷 / 10期
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