Direct fabrication of IC sacrificial patterns via rapid prototyping approaches

被引：0
|
作者：
Marwah, Omar Mohd Faizan [1 ]
Sharif, Safian [2 ]
Ibrahim, Mustaffa [1 ]
机构：
[1] Faculty of Mechanical and Manufacturing Engineering, Universiti Tun Hussein Onn Malaysia, 86400 BatuPahat, Johor, Malaysia
[2] Faculty of Mechanical Engineering, Universiti Teknologi Malaysia, 81300 Skudai, Johor, Malaysia
来源：
International Journal of Automation Technology | 2012年 / 6卷 / 05期
关键词：
D O I：
10.20965/ijat.2012.p0570
中图分类号：
学科分类号：
摘要：
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页码：570 / 575
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