Li-doped ZnO ceramic target preparation and RF magnetron sputtering ZnO films

被引：0
|
作者：
Chen, Zhu [1 ,2 ]
Zhang, Shu-Ren [2 ]
Du, Shan-Yi [3 ]
Yang, Cheng-Tao [2 ]
Zheng, Ze-Yu [2 ]
Li, Bo [2 ]
Sun, Ming-Xia [2 ]
机构：
[1] Department of Telecommunication Engineering, Chengdu University of Information Technology, Chengdu 610225, China
[2] School of Microelectronics and Solid State Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China
[3] Center for Composite Materials, Harbin Institute of Technology, Harbin 150001, China
来源：
Wuji Cailiao Xuebao/Journal of Inorganic Materials | 2006年 / 21卷 / 04期
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页码：1011 / 1017
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