Impact of Total Ionizing Dose Effects on the Threshold Voltage Hysteresis of SiC MOSFETs

被引:0
|
作者
Liang, Xiaowen [1 ,2 ]
Wei, Ying [1 ,2 ]
Zhang, Dan [1 ,2 ]
Sun, Jing [1 ,2 ]
Li, Yudong [1 ,2 ]
Yu, Xuefeng [1 ,2 ]
Guo, Qi [1 ,2 ]
机构
[1] Chinese Acad Sci, State Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China
[2] Chinese Acad Sci, Xinjiang Inst Phys & Chem Technol, Xinjiang Key Lab Extreme Environm Elect, Urumqi 830011, Peoples R China
关键词
Threshold voltage; Hysteresis; Radiation effects; Silicon carbide; MOSFET; Logic gates; Annealing; Oxide trapped charges; silicon carbide (SiC) MOSFET; threshold voltage hysteresis; total ionizing dose (TID) effect; SINGLE-EVENT BURNOUT; 5 MEV PROTON; POWER MOSFETS; BIAS; IRRADIATION; INSTABILITY; MECHANISMS; TOLERANCE; DAMAGES;
D O I
10.1109/TED.2024.3457572
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This work investigates the effects of total ionizing dose (TID) irradiation bias, temperature, dose, and post-irradiation annealing on the threshold voltage hysteresis of silicon carbide (SiC) MOSFETs. The research reveals that the TID effect decreases the threshold voltage hysteresis, which is proportional to the accumulation of radiation-induced charges in the gate oxide. The reduction in threshold voltage hysteresis is unrelated to the change of the interface-trapped charges. However, it is mainly caused by the reduction of the nonequilibrium interface trapped charge energy range (Delta E-VTH). The radiation-induced charges can exacerbate the hole emission process of the donor interface traps during the up-sweep process, which causes an upward shift of the lower boundary of Delta E-VTH . The slight shift of the Fermi energy level during the down-sweep process leads to no significant change in the upper boundary of Delta E-VTH . Eventually, the TID effect causes a reduction in the threshold voltage hysteresis. The changes in the occupation probability of the donor and acceptor interface traps during the scanning of the I-DS-V(GS )curves were extracted by TCAD simulation. The results showed that the inconsistent changes in the occupation probability of the donor interface traps in the up-sweep and down-sweep curves cause a reduction of the threshold voltage hysteresis. The analysis was further verified using different voltage sweep ranges in the experiment.
引用
收藏
页码:6889 / 6896
页数:8
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