Effects of N-face finishing on geometry of double-side polished GaN substrate

被引：0
|
作者：
Koyama, Koji [1 ]
Aida, Hideo [1 ,2 ]
Uneda, Michio [3 ]
Takeda, Hidetoshi [1 ]
Kim, Seong-Woo [1 ]
Takei, Hiroki [1 ]
Yamazaki, Tsutomu [2 ]
Doi, Toshiro [2 ]
机构：
[1] Namiki Precision Jewel Co., Ltd, 3-8-22 Shinden, Adachi, Tokyo 123-8511, Japan
[2] Kyushu University, 6-1 Kasuga Kouen, Kasuga, Fukuoka 816-8580, Japan
[3] Kanazawa Institute of Technology, 7-1 Ogigaoka, Nonoichi, Ishikawa 921-8501, Japan
来源：
International Journal of Automation Technology | 2013年 / 8卷 / 01期
关键词：
20;
D O I：
10.20965/ijat.2014.p0121
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：121 / 127
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