Preparation of SiO2@CeO2 composite abrasive and its polishing performance

The coated CeO2@SiO2 composite abrasive was prepared by chemical precipitation method, using silica powder, cerium nitrate and ammonium bicarbonate as raw materials. Thermo gravimetry-differential sanning calotimetry (TG/DSC), X-ray diffraction (XRD), scanning electron microscope (SEM), energy diffraction spectrum (EDS), infrared (IR) spectra were used to characterize the CeO2@SiO2 composite particle. The slurry prepared with the composite abrasive was used to polish K9 glass. Themorphology differences before and after polishing were investigated with atomic force microscope (AFM), and the RMS values was obtained. The results showed that the CeO2 coated SiO2 particles were successfully prepared, nano-CeO2 was absorbed in the surface of silica powder mainly with Vanderwals force. The surface scratches of the glass were less after polishing, and the RMS was reduced from 54.217 nm to 1.073 nm.