Stress analysis and filming control of resist on ultraviolet-curable resist

被引：0
|
作者：
State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China [1 ]
机构：
来源：
Hsi An Chiao Tung Ta Hsueh | 2006年 / 9卷 / 1028-1031期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Extreme Ultraviolet Resist Outgassing Quantification Verification by Resist Film Analysis
    Kobayashi, Shinji
    Santillan, Julius Joseph
    Oizumi, Hiroaki
    Itani, Toshiro
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2009, 48 (06) : 06FC021 - 06FC024
  • [2] Stress and flow analyses of ultraviolet-curable resin during curing
    Umezaki, Eisaku
    Okano, Akira
    Koyama, Hiroto
    INTERNATIONAL CONFERENCE ON EXPERIMENTAL MECHANICS 2013 AND TWELFTH ASIAN CONFERENCE ON EXPERIMENTAL MECHANICS, 2014, 9234
  • [3] Ultraviolet-curable liquid natural rubber
    Phinyocheep, P
    Duangthong, S
    JOURNAL OF APPLIED POLYMER SCIENCE, 2000, 78 (08) : 1478 - 1485
  • [4] Microchannel fabrication via ultraviolet-nanoimprint lithography and electron-beam lithography using an ultraviolet-curable positive-tone electron-beam resist
    Matsumoto, Haruki
    Okabe, Takao
    Taniguchi, Jun
    MICROELECTRONIC ENGINEERING, 2020, 226
  • [5] Ultraviolet-curable coatings using cam.
    Rachakonda, SH
    Smith, OW
    Thames, SF
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1999, 218 : U439 - U440
  • [6] ULTRAVIOLET-CURABLE SILICONES FOR INTEGRATED-CIRCUIT PROTECTION
    LUTZ, MA
    SCHEIBERT, KA
    ACS SYMPOSIUM SERIES, 1989, 407 : 275 - 283
  • [7] Polymerization shrinkage stress measurement for a UV-curable resist in nanoimprint lithography
    Amirsadeghi, Alborz
    Lee, Jae Jong
    Park, Sunggook
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (11)
  • [8] Flow lithography in ultraviolet-curable polydimethylsiloxane microfluidic chips
    Kim, Junbeom
    An, Heseong
    Seo, Yoojin
    Jung, Youngmee
    Lee, Jong Suk
    Choi, Nakwon
    Bong, Ki Wan
    BIOMICROFLUIDICS, 2017, 11 (02):
  • [9] High-Stretchable and Transparent Ultraviolet-Curable Elastomer
    Chen, Lei
    He, Yongchang
    Dai, Lu
    Zhang, Wang
    Wang, Hao
    Liu, Peng
    POLYMERS, 2024, 16 (24)
  • [10] Ultraviolet-curable powder coatings, the marriage of two compliant technologies
    Nutro Corp, Strongsville, United States
    Met Finish, 1 A (38-41):
12345