Plasma parameters investigation of the RF inductive plasma source with diameter 46 cm. Part III. Power absorption efficiency

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作者：
Aleksandrov, A.F. [1 ]
Vavilin, K.V. [1 ]
Kralkina, E.A. [1 ]
Neklyudovav, P.A. [1 ]
Pavlov, V.B. [1 ]
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[1] Moscow State University, Department of Physics, 1 Leninskie Gory, Moscow, 111991, Russia
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Applied Physics | 2014年 / 02期
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页码：17 / 20
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