Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing

被引：0
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作者：
Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics, and Physics, Chinese Academy of Sciences, Changchun [1 ]
130033, China
机构：
来源：
Chin. Opt. Lett. |
关键词：
Convergence rates - Large computers - Magnetorheological finishing - Optical components - Polishing wheels - Power spectrum density - Removal function - Virtual fabrication;
D O I：
10.3788/COL201513.S22203
中图分类号：
学科分类号：
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