Displacement control of piezoceramic micro-motion worktable using self-sensing

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作者：
Faculty of Engineering, Ningbo University, Ningbo 315211, China [1 ]
不详 [2 ]
不详 [3 ]
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来源：
Jixie Gongcheng Xuebao | 2008年 / 4卷 / 159-164+170期
关键词：
Piezoelectric ceramics;
D O I：
10.3901/jme.2008.04.159
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