Oxygen concentration and properties of SiOx coating deposited in roll-to-roll process

被引：0
|
作者：
Qi, Fengyang [1 ]
Chen, Qiang [1 ]
Liu, Fuping [1 ]
机构：
[1] Key Laboratory of Beijing for Graphic and Packaging Material and Technology, Beijing Institute of Graphic Communication, Beijing 102600, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2012年 / 32卷 / 09期
关键词：
Coatings;
D O I：
10.3969/j.issn.1672-7126.2012.09.16
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：841 / 844
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