Study on the actuation and sensing propertise of space-sharing piezoelectric self-sensing actuator

Piezoelectric self-sensing actuator can be applied in active vibration control. Space-sharing mode is a new way to implement the self-sensing actuator by dividing the electrode of one piezoelectric ceramic wafer into sensing and actuating sections. The actuation and sensing effect of two patterns of the dividing-electrode piezoelectric wafer on the cantilever beam are studied. The frequency responses of such a system under desired operating conditions prove the feasibility of a sensor and an actuator coexisting on a single piezoelectric wafer. Experiment results also show that there is a constant offset in the output of the sensor due to the parasitic actuator-sensor coupling. A method to determine the electrostatic coupling is proposed using the property of beam at the anti-resonant frequencies. Experiments are carried out to measure the electrostatic coupling coefficients under different electrode widths and electrode gaps. The groundwork is established for implementing space-sharing piezoelectric self-sensing in vibration reduction and motion control.