Design and fabrication of integrated negative feedback resistor for InGaAs/ InP avalanche photodiode

The serial resistor of alloy material can be integrated on negative feedback avalanche diodes to reduce afterpulsing effect. In this work, the influence of parasitic capacitance on the avalanche quenching resistor was theoretically analyzed. By using simulation model of device & circuit mixed-mode, the quenching capability of integrated resistors was evaluated with the parasitic parameters. For the material growth of feedback quenching resistor, thin film based on CrSi alloy was prepared by ion beam sputtering process, realizing the sheet resistance of 3 k52/square. The resistor material were sufficiently investigated by characterizing the morphology and element component. CrSi pattern of spiral shape was fabricated on sapphire substrate, realizing a resistor of the order of 500 k52 in area of diameter 40 mu m, which was equivalent to the active area of avalanche diodes. The electrical measurement indicated the excellent temperature stability of this integrated resistor, showing the promising application prospect for preparing high-performance negative feedback avalanche diodes.