Self-calibration of MEMS accelerometer based on multi-position detection method

被引：0
|
作者：
Zhou, Kaiyue [1 ,2 ]
Li, Jia [1 ,2 ]
Wang, Weibing [1 ,2 ]
Chen, Dapeng [1 ,2 ]
机构：
[1] University of Chinese Academy of Sciences, Beijing,100049, China
[2] Institute of Microelectronics, Chinese Academy of Sciences, Beijing,100029, China
来源：
Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology | 2021年 / 53卷 / 12期
关键词：
12-position method - Ellipsoid fitting method - Ellipsoid-fitting - Fitting method - Least-squares- methods - Levenberg-Marquardt algorithm - MEMS (microelectromechanical system) - Micro-electro- mechanical system accelerometers - Modeling parameters - Self calibration;
D O I：
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中图分类号：
学科分类号：
摘要：
20
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收藏
页码：114 / 120
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