Synchrotron radiation-induced nitrization and oxidation on Si surface at low temperature

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[1] Kanashima, Takeshi
[2] 1,Maida, Osamu
[3] Kohma, Norinao
[4] Agata, Masashi
[5] Yudate, Shinji
[6] Ueno, Masato
[7] Okuyama, Masanori
[8] Ohashi, Haruhiko
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Kanashima, T. (kanashima@ee.es.osaka-u.ac.jp) | 1600年 / Japan Society of Applied Physics卷 / 40期
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