Preparation of ferroelectric thick film actuator on silicon substrate by screen-printing

被引：0
|
作者：
Futakuchi, Tomoaki [1 ]
Yamano, Hiroshi [2 ]
Adachi, Masatoshi [2 ]
机构：
[1] Toyama Industrial Technology Center, 383 Takada, Toyama 930-0866, Japan
[2] Department of Electronics and Informatics, Faculty of Engineering, Toyama Prefectural University, Kosugi-machi, Toyama 939-0398, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2001年 / 40卷 / 9 B期
关键词：
Screen-printing methods;
D O I：
10.1143/jjap.40.5687
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：5687 / 5689
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