Surface morphology and optical absorption of femtosecond laser microstructured silicon coated with AZO flim

被引：0
|
作者：
Tang W. [1 ,3 ]
Zhou M. [1 ,2 ]
Ren N. [1 ,3 ]
Li B. [1 ,2 ]
Zhang W. [1 ,2 ]
机构：
[1] Key Laboratory of Center for Photon Manufacturing Science and Technology of Jiangsu Province, Jiangsu University, Zhenjiang
[2] School of Material Science and Engineering, Jiangsu University, Zhenjiang
[3] School of Mechanical Engineering, Jiangsu University, Zhenjiang
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2011年 / 38卷 / 12期
关键词：
Light absorption; Megnetron sputtering; Microstructured silicon; Thin films;
D O I：
10.3788/CJL201138.1207001
中图分类号：
学科分类号：
摘要：
The surface spike microstructures are fabricated by irradiating the surface of mono-crystal silicon with femtosecond laser in the atmosphere of SF 6 and then coated with aluminium-doped zinc oxide (AZO) thin film by magnetron sputter method. The surface microstructures and optical absorption of coated and uncoated sample are observed and studied. The results indicate that laser energy density has effect on the size and spacing of the spikes on the surface. The main reason for microstructured silicon exhibiting good optical absorption in the wavelength region of 200~1000 nm is multiple-reflection of incident light between the spikes. The rough surface of microstructured silicon and anti-reflection effect of AZO thin film enhance the visible light (400~800 nm) absorption of coated sample and high infrared light reflection of AZO thin film causes a red-shift of reflection peak.
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