Recent developments on magnetron sputtering of CrAlN coating

被引：0

作者：

Jin H. ^{[1
,2
]}

Zhang Y. ^{[3
]}

Shi Z. ^{[2
,3
]}

Zhang G. ^{[4
]}

机构：

[1] School of Equipment Engineering, Shenyang Ligong University, Shenyang

[2] School of Material Science and Engineering, Shenyang University of Technology, Shenyang

[3] Liaoning Research Institute of Light Industry, Shenyang

[4] School of Material Science and Engineering, Shenyang Ligong University, Shenyang

来源：

Zhang, Gang (1141116996@163.com) | 2016年 / Cailiao Daobaoshe/ Materials Review卷 / 30期

关键词：

Coating; CrAlN; Magnetron sputtering;

D O I：

10.11896/j.issn.1005-023X.2016.03.010

中图分类号：

学科分类号：

摘要：

The general developments of CrAlN coatings by different magnetic sputtering technologies are summarized. The microstructure, mechanical properties, antioxidant activity and corrosion resistance of CrAlN coatings are analyzed. Process optimization of different magnetron sputtering technologies and novel preparation process of magnetron sputtering are the new trends of magnetron sputtering CrAlN coatings in the future. New application potential should be further explored on the basis of improving the performance of CrAlN coatings. © 2016, Materials Review Magazine. All right reserved.

引用

页码：54 / 59

页数：5

共 44 条

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