Spatial resolution, information depth and sem-image contrast of subsurface structures obtained in backscattered electrons

The correlation between the principal parameters of the image formation mechanism of subsurface details of an object in the mode of backscattered electrons in SEM has been considered. The problems of image contrast, spatial resolution and microheterogeneity depth in the bulk of the object, on which the information can be obtained, have been discussed. The minimal current of the electron probe of SEM which is necessary to obtain an acceptable image contrast has been estimated.