Analysis temperature characteristics of atmosphere pressure sensor caused by residual gas

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作者：
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China [1 ]
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来源：
Key Eng Mat | / 504-508期
关键词：
Compilation and indexing terms; Copyright 2024 Elsevier Inc;
D O I：
10.4028/www.scientific.net/KEM.645-646.504
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学科分类号：
摘要：
Atmospheric temperature - Binary alloys - Chromium alloys - Gases
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