Transient response of electrostatic field due to collision ESD between spherical electrodes by using bare-chip optical electric field sensor

被引:0
|
作者
Kato K. [1 ]
Kawamata K. [1 ]
Ishigami S. [1 ]
Osawa R. [2 ]
Ishida T. [1 ]
Fujiwara O. [3 ]
机构
[1] Department of Electronic Engineering, Tohoku Gakuin University, 1-13-1, Chuo, Tagajo
[2] SEIKOH GIKEN Co., Ltd., 296-1, Matsuhidai, Matsudo
[3] Noise Laboratory Co., LTD., 1-4-4, Chiyoda, Chuo-ku, Sagamihara
关键词
Bare-chip optical electric field sensor; Collision ESD; Electrostatic field; Spherical electrodes; Transient response;
D O I
10.1541/ieejfms.140.599
中图分类号
O441.1 [电学]; TM12 [];
学科分类号
摘要
Transient electric fields due to collision electrostatic discharges (ESDs) between charged spherical electrodes with a diameter of 30 mm at a charging voltage from 600 V are measured in the close proximity to the spark point by using a bare-chip optical electric field sensor. The transient responses of the electrostatic fields at distances of over 6 mm away from the spark point are also shown. © 2020 The Institute of Electrical Engineers of Japan.
引用
收藏
页码:599 / 600
页数:1
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