Fabrication and testing of precise off-axis convex aspheric mirror

被引：8
|
作者：
Zhang F. [1 ]
机构：
[1] Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Acad. of Sci.
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2010年 / 18卷 / 12期
关键词：
Back transmission null testing; Computer-controlled Optical Surfacing(CCOS); Contour testing; Off-axis convex aspheric surface; Optical axis accuracy;
D O I：
10.3788/OPE.20101812.2557
中图分类号：
学科分类号：
摘要：
To improve the fine surface figure accuracy and optical axis accuracy of an off-axis convex aspheric mirror, the fabrication and testing technologies of the off-axis convex aspheric mirror were studied. Firstly, a Three Mirror Anastigmat (TMA) optical system and the specification requirements of the second off-axis convex aspheric mirror in the TMA optical system were presented. Then, the technique of Computer-controlled Optical Surfacing(CCOS) for manufacturing the aspheric mirror and the FSGJ numerical control machine for processing aspheric surface were introduced. Finally, the contour testing in a lapping stage and the back transmission null testing in a polishing stage for the convex aspheric mirror were described, and the controlling technology for the optical axis accuracy of off-axis convex aspheric mirror was studied. The testing results indicate that the surface figure accuracy and the optical axis accuracy of the off-axis convex aspheric mirror are 0.017λ RMS and 9.4″, respectively. All the specifications of the off-axis convex aspheric mirror can meet the requirements of the optical design.
引用
收藏
页码：2556 / 2563
页数：7
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