Scale factor temperature drift suppressing method for capacitive micro accelerometer

被引：0
|
作者：
Liu Y. [1 ]
Xia P. [1 ]
Dong J. [1 ]
Yang X. [1 ]
机构：
[1] Key Laboratory for High-precision Inertial Instrument and System Technology of the Ministry of Education, Department of Precision Instrument, Tsinghua University, Beijing
来源：
| 2018年 / Editorial Department of Journal of Chinese Inertial Technology卷 / 26期
关键词：
Micro machined accelerometer; Preload voltage; Scale factor; Temperature drift;
D O I：
10.13695/j.cnki.12-1222/o3.2018.03.014
中图分类号：
学科分类号：
摘要：
As an inertial sensor device, micro-machined accelerometer has been applied in various inertial navigation systems. However, the impact of temperature becomes the main barrier of the improvement of precision. In order to improve the temperature stability of the scale factor of closed-loop capacitive micro mechanical accelerometer, an adjusting the preload voltage method to suppress the temperature drift of the scale factor is adopted. This method is realized by adjusting the preload voltage according to the output signal of the temperature measuring circuit. The results of comparative experiments show that the scale factor temperature coefficient of accelerometer decreases from 213.7×10-6/℃ to 42.7×10-6/℃ after compensation in the temperature range of -30℃~60℃, which validates the effectiveness of the method. © 2018, Editorial Department of Journal of Chinese Inertial Technology. All right reserved.
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页码：366 / 369
页数：3
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