Mapping Rules between Geometric Errors in Six-axis Stages and Alignment Accuracy of Fiber Array

被引：0
|
作者：
Tang H. [1 ]
Tang G. [1 ]
机构：
[1] College of Mechanical Engineering, Hunan University of Science and Technology, Xiangtan, 411201, Hunan
来源：
Zhongguo Jixie Gongcheng/China Mechanical Engineering | 2019年 / 30卷 / 14期
关键词：
Fiber alignment accuracy; Geometric error; Mapping rule; Multi-axis motion stage; Package system;
D O I：
10.3969/j.issn.1004-132X.2019.014.013
中图分类号：
学科分类号：
摘要：
Aiming at positions and poses of fiber array which was fixed on six-axis stage, geometric error model was established by homogeneous transformation matrix. A variance sensitivity analysis was adopted to identify important error terms on alignment accuracy according to stage configuration. Based on the results, mapping rules between geometric errors in multi-axis motion stage and alignment accuracy of fiber array were established. This analyzing procedure is reliable from the simulation results, and also may develop the mapping rules easily and conveniently, which will be as the theoretical basis for increasing packaging efficiency and alignment efficiency. © 2019, China Mechanical Engineering Magazine Office. All right reserved.
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页码：1720 / 1726
页数：6
相关论文
共 15 条
  • [1] Li X.H., Gao W., Hiroshi M., Et al., A Six Degree of Freedom Surface Encoder for Precision Positioning of a Planar Motion Stage, Precision Engineering, 37, 3, pp. 771-781, (2013)
  • [2] Zheng Y., Duan J., Coupling Analysis between Planar Optical Waveguide and Fiber Array, Journal of Central South University (Science and Technology), 40, 3, pp. 681-686, (2009)
  • [3] Suh S.H., Lee E.S., Jung S.Y., Error Modeling and Measurement for the Rotary Table of Five-axis Machine Tools, Advanced Manufacturing Technology, 14, 9, pp. 656-663, (1998)
  • [4] Erik L.J., Bancha A., Systematic Geometric Rigid Body Error Identification of 5-axis Milling Machines, Computer-Aided Design, 39, 4, pp. 229-244, (2007)
  • [5] Liu Y., Development of Huston's Method on Multi-body Dynamics, China Mechanical Engineering, 11, 6, pp. 601-607, (2000)
  • [6] Zhang D., Zhang C., Wei Q., Et al., Modeling and Control of Piezo-stage Using Neural Networks, Opt. Precision Eng., 20, 3, pp. 587-596, (2012)
  • [7] Su S., Li S., Wang G., Identification Method for Errors of Machining Center Based on Volumetric Error Model, Chinese Journal of Mechanical Engineering, 38, 7, pp. 121-125, (2002)
  • [8] Wang X., Yang J., Yan J., Synthesis Error Modeling of the Five-axis Machine Tools Based on Multi-body System Theory, Journal of Shanghai Jiaotong University, 42, 5, pp. 761-765, (2008)
  • [9] Yang J., Ren Y., Zhu W., Et al., Research on On-line Modeling Method of Thermal Error Compensation Model for CNC Machine, Chinese Journal of Mechanical Engineering, 39, 3, pp. 81-84, (2003)
  • [10] Tian Y., Zhang D., Chen H., Et al., Modeling of Precision Grinding Process Based on Micro-positioning Table and Error Compensation Technology, Chinese Journal of Mechanical Engineering, 41, 4, pp. 168-173, (2005)
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