Determination of trace elements in sintered and single-crystal silicon carbide by laser ablation in liquid inductively coupled plasma mass spectrometry

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[1] [1,Machida, Ryo
[2] Nishioka, Rina
[3] Fujiwara, Masahide
[4] Furuta, Naoki
来源：
Furuta, Naoki (nfuruta@chem.chuo-u.ac.jp) | 2017年 / Japan Society for Analytical Chemistry卷 / 33期
关键词：
641.2 Heat Transfer - 712.1 Semiconducting Materials - 714.2 Semiconductor Devices and Integrated Circuits - 744.4.1 Semiconductor Lasers - 744.8 Laser Beam Interactions - 801 Chemistry - 804.2 Inorganic Compounds - 932.3 Plasma Physics - 933.1 Crystalline Solids;
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