Error analysis on the roll angle measurement of machine tool's guideway

被引：1
|
作者：
Qi J. [1 ]
Wang Z. [1 ]
Huang J. [1 ]
Yu B. [1 ]
Gao J. [2 ]
机构：
[1] School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an
[2] State Key Laboratory for Manufacturing System Engineering, Xi'an Jiaotong University, Xi'an
来源：
Huang, Junhui | 1600年 / Xi'an Jiaotong University卷 / 50期
关键词：
High-reflectivity mirror; Incident angle; Machine tool's guideway; Measuring sensitivity; Roll angle;
D O I：
10.7652/xjtuxb201609005
中图分类号：
学科分类号：
摘要：
To evaluate the influence of incident angle error of the reflector on the roll angle measurement of machine tool's guideway, a new mathematical model was established by Jones matrix method. The new model takes the influence of the incident angle error of high-reflectivity mirror into consideration based on the existing model. The reflected light of the mirror with different incident angles was analyzed based on the action mechanism of multiple dielectric films. Then the influence of incident angle error of reflector on the roll angle measurement was calculated. Results showed that the measurement gain coefficient varied with the incident angle and a maximum value of 720 was obtained when the incident angle was 36-deg, a 6-fold increase compared with previous results. In the experimental setup, we measured a gain coefficient of 346 at the 38-deg incident angle to the mirror. A roll angle measuring resolution 0.1-arcsec was attained using a phase meter with a resolution of 0.01-deg. The theoretical analysis of the new model was verified, which also provides a measuring sensitivity enhancement approach by carefully controlling the incident angle of the mirror. © 2016, Editorial Office of Journal of Xi'an Jiaotong University. All right reserved.
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页码：31 / 35
页数：4
相关论文
共 9 条
  • [1] Hou W., Zhong C., Le Y., Et al., High precision roll angle interferometer, Journal of Mechanical Engineering, 47, 5, pp. 99-103, (2013)
  • [2] Tao W., Pu Z., Grating wedge disk and its application in the measurement of rotating angle, Journal of Optoelectronics: Laser, 13, 4, pp. 371-374, (2002)
  • [3] Zhong L., Wang Z., Tang S., Et al., Measurement error analysis for machine tool error measurement due to inclined half wave plate, Journal of Xi'an Jiaotong University, 47, 5, pp. 99-103, (2013)
  • [4] Tang S., Wang Z., Gao J., Et al., Measurement method for roll angular displacement with a high resolution by using diffraction gratings and a heterodyne interferometer, Review of Scientific Instruments, 85, (2014)
  • [5] Jiang H., Yin C., Sensitivity enhanced roll angle measurement, Opt Eng, 39, 2, pp. 516-519, (2000)
  • [6] Wu C.-M., Chang Y.-T., Roll angle displacement system with microradian accuracy, Sensors and Actuators: A, 116, pp. 145-149, (2004)
  • [7] Liu Z., Lin D., Jiang H., Et al., Roll angle interferometer by means of wave plates, Sensors and Actuators: A, 104, pp. 127-131, (2003)
  • [8] Li Z., Wang Z., Huang J., Et al., Phase loss of right-angle prism in roll angle measurement and its solution, Journal of Xi'an Jiaotong University, 48, 9, pp. 112-116, (2014)
  • [9] Li Z., Wang Z., Huang J., Et al., Design and analysis of the polarization-preserving films for rectangular prism, Chinese Journal of Lasers, 42, 3, pp. 1-5, (2015)
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