Vertical-scanning shape-measurement interferometry applicable under vibrating environment

被引：0
|
作者：
Adachi, Masaaki
Hirano, Yuuki
Kawamura, Masanori
Iwao, Yuuta
机构：
来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2009年 / 75卷 / 11期
关键词：
Compendex;
D O I：
10.2493/jjspe.75.1299
中图分类号：
学科分类号：
摘要：
Interferometry
引用
收藏
页码：1299 / 1304
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